JPS62199951U - - Google Patents

Info

Publication number
JPS62199951U
JPS62199951U JP8721786U JP8721786U JPS62199951U JP S62199951 U JPS62199951 U JP S62199951U JP 8721786 U JP8721786 U JP 8721786U JP 8721786 U JP8721786 U JP 8721786U JP S62199951 U JPS62199951 U JP S62199951U
Authority
JP
Japan
Prior art keywords
wafer storage
view
jig
transporting
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8721786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8721786U priority Critical patent/JPS62199951U/ja
Publication of JPS62199951U publication Critical patent/JPS62199951U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging Frangible Articles (AREA)
JP8721786U 1986-06-10 1986-06-10 Pending JPS62199951U (US20070167544A1-20070719-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8721786U JPS62199951U (US20070167544A1-20070719-C00007.png) 1986-06-10 1986-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8721786U JPS62199951U (US20070167544A1-20070719-C00007.png) 1986-06-10 1986-06-10

Publications (1)

Publication Number Publication Date
JPS62199951U true JPS62199951U (US20070167544A1-20070719-C00007.png) 1987-12-19

Family

ID=30944237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8721786U Pending JPS62199951U (US20070167544A1-20070719-C00007.png) 1986-06-10 1986-06-10

Country Status (1)

Country Link
JP (1) JPS62199951U (US20070167544A1-20070719-C00007.png)

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