JPS62198094U - - Google Patents

Info

Publication number

JPS62198094U

JPS62198094U JP8590486U JP8590486U JPS62198094U JP S62198094 U JPS62198094 U JP S62198094U JP 8590486 U JP8590486 U JP 8590486U JP 8590486 U JP8590486 U JP 8590486U JP S62198094 U JPS62198094 U JP S62198094U

Authority

JP

Japan

Prior art keywords

glove

wafer processing

hole

processing box

subchamber

Prior art date

1986-06-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229920005549 butyl rubber Polymers 0.000 claims 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1

Cited By (1)