JPS62193743U - - Google Patents

Info

Publication number

JPS62193743U

JPS62193743U JP8338586U JP8338586U JPS62193743U JP S62193743 U JPS62193743 U JP S62193743U JP 8338586 U JP8338586 U JP 8338586U JP 8338586 U JP8338586 U JP 8338586U JP S62193743 U JPS62193743 U JP S62193743U

Authority

JP

Japan

Prior art keywords

diffusion layer

hole

insulating film

semiconductor substrate

phosphorus concentration

Prior art date

1986-05-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000012212 insulator Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 4
• 238000009792 diffusion process Methods 0.000 claims 4
• OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
• 229910052698 phosphorus Inorganic materials 0.000 claims 2
• 239000011574 phosphorus Substances 0.000 claims 2
• 239000013067 intermediate product Substances 0.000 description 1