JPS62193732U - - Google Patents

Info

Publication number
JPS62193732U
JPS62193732U JP8301086U JP8301086U JPS62193732U JP S62193732 U JPS62193732 U JP S62193732U JP 8301086 U JP8301086 U JP 8301086U JP 8301086 U JP8301086 U JP 8301086U JP S62193732 U JPS62193732 U JP S62193732U
Authority
JP
Japan
Prior art keywords
carriers
wafer
wafer transfer
transfer device
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8301086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8301086U priority Critical patent/JPS62193732U/ja
Publication of JPS62193732U publication Critical patent/JPS62193732U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP8301086U 1986-05-30 1986-05-30 Pending JPS62193732U (US20050075337A1-20050407-C00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8301086U JPS62193732U (US20050075337A1-20050407-C00081.png) 1986-05-30 1986-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8301086U JPS62193732U (US20050075337A1-20050407-C00081.png) 1986-05-30 1986-05-30

Publications (1)

Publication Number Publication Date
JPS62193732U true JPS62193732U (US20050075337A1-20050407-C00081.png) 1987-12-09

Family

ID=30936197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8301086U Pending JPS62193732U (US20050075337A1-20050407-C00081.png) 1986-05-30 1986-05-30

Country Status (1)

Country Link
JP (1) JPS62193732U (US20050075337A1-20050407-C00081.png)

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