JPS62193271A - 半導体集積回路装置の製造方法 - Google Patents

半導体集積回路装置の製造方法

Info

Publication number
JPS62193271A
JPS62193271A JP3565286A JP3565286A JPS62193271A JP S62193271 A JPS62193271 A JP S62193271A JP 3565286 A JP3565286 A JP 3565286A JP 3565286 A JP3565286 A JP 3565286A JP S62193271 A JPS62193271 A JP S62193271A
Authority
JP
Japan
Prior art keywords
integrated circuit
main surface
semiconductor
circuit device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3565286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410224B2 (enrdf_load_stackoverflow
Inventor
Akinori Shimizu
了典 清水
Misao Saga
佐賀　操
Toshio Komori
古森　敏夫
Masato Nishizawa
正人 西澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP3565286A priority Critical patent/JPS62193271A/ja
Publication of JPS62193271A publication Critical patent/JPS62193271A/ja
Publication of JPH0410224B2 publication Critical patent/JPH0410224B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP3565286A 1986-02-20 1986-02-20 半導体集積回路装置の製造方法 Granted JPS62193271A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3565286A JPS62193271A (ja) 1986-02-20 1986-02-20 半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3565286A JPS62193271A (ja) 1986-02-20 1986-02-20 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62193271A true JPS62193271A (ja) 1987-08-25
JPH0410224B2 JPH0410224B2 (enrdf_load_stackoverflow) 1992-02-24

Family

ID=12447804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3565286A Granted JPS62193271A (ja) 1986-02-20 1986-02-20 半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62193271A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6484673A (en) * 1987-09-28 1989-03-29 Kanagawa Prefecture Manufacture of semiconductor optical detection element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6484673A (en) * 1987-09-28 1989-03-29 Kanagawa Prefecture Manufacture of semiconductor optical detection element

Also Published As

Publication number Publication date
JPH0410224B2 (enrdf_load_stackoverflow) 1992-02-24

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