JPS62192643U - - Google Patents

Info

Publication number
JPS62192643U
JPS62192643U JP7950486U JP7950486U JPS62192643U JP S62192643 U JPS62192643 U JP S62192643U JP 7950486 U JP7950486 U JP 7950486U JP 7950486 U JP7950486 U JP 7950486U JP S62192643 U JPS62192643 U JP S62192643U
Authority
JP
Japan
Prior art keywords
cassette
wafers
transport means
holding stand
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7950486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7950486U priority Critical patent/JPS62192643U/ja
Publication of JPS62192643U publication Critical patent/JPS62192643U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP7950486U 1986-05-28 1986-05-28 Pending JPS62192643U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7950486U JPS62192643U (US07923587-20110412-C00022.png) 1986-05-28 1986-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7950486U JPS62192643U (US07923587-20110412-C00022.png) 1986-05-28 1986-05-28

Publications (1)

Publication Number Publication Date
JPS62192643U true JPS62192643U (US07923587-20110412-C00022.png) 1987-12-08

Family

ID=30929423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7950486U Pending JPS62192643U (US07923587-20110412-C00022.png) 1986-05-28 1986-05-28

Country Status (1)

Country Link
JP (1) JPS62192643U (US07923587-20110412-C00022.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348438A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348438A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置

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