JPS62186622U - - Google Patents

Info

Publication number

JPS62186622U

JPS62186622U JP7278786U JP7278786U JPS62186622U JP S62186622 U JPS62186622 U JP S62186622U JP 7278786 U JP7278786 U JP 7278786U JP 7278786 U JP7278786 U JP 7278786U JP S62186622 U JPS62186622 U JP S62186622U

Authority

JP

Japan

Prior art keywords

processing chamber

processing

ceiling plate

plates

abrasion prevention

Prior art date

1986-05-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000006185 dispersion Substances 0.000 claims description 4
• 230000002265 prevention Effects 0.000 claims description 4
• 238000005299 abrasion Methods 0.000 claims description 3
• 239000000463 material Substances 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 238000004140 cleaning Methods 0.000 description 1

Cited By (2)