JPS62186426U - - Google Patents

Info

Publication number
JPS62186426U
JPS62186426U JP7510486U JP7510486U JPS62186426U JP S62186426 U JPS62186426 U JP S62186426U JP 7510486 U JP7510486 U JP 7510486U JP 7510486 U JP7510486 U JP 7510486U JP S62186426 U JPS62186426 U JP S62186426U
Authority
JP
Japan
Prior art keywords
wafer
cleaning
transfer device
drying
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7510486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7510486U priority Critical patent/JPS62186426U/ja
Publication of JPS62186426U publication Critical patent/JPS62186426U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP7510486U 1986-05-19 1986-05-19 Pending JPS62186426U (US06168776-20010102-C00028.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7510486U JPS62186426U (US06168776-20010102-C00028.png) 1986-05-19 1986-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7510486U JPS62186426U (US06168776-20010102-C00028.png) 1986-05-19 1986-05-19

Publications (1)

Publication Number Publication Date
JPS62186426U true JPS62186426U (US06168776-20010102-C00028.png) 1987-11-27

Family

ID=30920934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7510486U Pending JPS62186426U (US06168776-20010102-C00028.png) 1986-05-19 1986-05-19

Country Status (1)

Country Link
JP (1) JPS62186426U (US06168776-20010102-C00028.png)

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