JPS62186423U - - Google Patents

Info

Publication number
JPS62186423U
JPS62186423U JP7541586U JP7541586U JPS62186423U JP S62186423 U JPS62186423 U JP S62186423U JP 7541586 U JP7541586 U JP 7541586U JP 7541586 U JP7541586 U JP 7541586U JP S62186423 U JPS62186423 U JP S62186423U
Authority
JP
Japan
Prior art keywords
melt
spacer
substrate holder
pitch
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7541586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7541586U priority Critical patent/JPS62186423U/ja
Publication of JPS62186423U publication Critical patent/JPS62186423U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7541586U 1986-05-20 1986-05-20 Pending JPS62186423U (US07923587-20110412-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7541586U JPS62186423U (US07923587-20110412-C00001.png) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7541586U JPS62186423U (US07923587-20110412-C00001.png) 1986-05-20 1986-05-20

Publications (1)

Publication Number Publication Date
JPS62186423U true JPS62186423U (US07923587-20110412-C00001.png) 1987-11-27

Family

ID=30921531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7541586U Pending JPS62186423U (US07923587-20110412-C00001.png) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPS62186423U (US07923587-20110412-C00001.png)

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