JPS62186353U - - Google Patents

Info

Publication number
JPS62186353U
JPS62186353U JP7268586U JP7268586U JPS62186353U JP S62186353 U JPS62186353 U JP S62186353U JP 7268586 U JP7268586 U JP 7268586U JP 7268586 U JP7268586 U JP 7268586U JP S62186353 U JPS62186353 U JP S62186353U
Authority
JP
Japan
Prior art keywords
filament
ion source
implantation apparatus
disposed
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7268586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7268586U priority Critical patent/JPS62186353U/ja
Publication of JPS62186353U publication Critical patent/JPS62186353U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7268586U 1986-05-16 1986-05-16 Pending JPS62186353U (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7268586U JPS62186353U (US07321065-20080122-C00160.png) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7268586U JPS62186353U (US07321065-20080122-C00160.png) 1986-05-16 1986-05-16

Publications (1)

Publication Number Publication Date
JPS62186353U true JPS62186353U (US07321065-20080122-C00160.png) 1987-11-27

Family

ID=30916355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7268586U Pending JPS62186353U (US07321065-20080122-C00160.png) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPS62186353U (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08124504A (ja) * 1994-10-25 1996-05-17 Hiroshima Nippon Denki Kk 熱電子放射高電流フィラメントイオンソース

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08124504A (ja) * 1994-10-25 1996-05-17 Hiroshima Nippon Denki Kk 熱電子放射高電流フィラメントイオンソース

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