JPS62183540U - - Google Patents
Info
- Publication number
- JPS62183540U JPS62183540U JP6862886U JP6862886U JPS62183540U JP S62183540 U JPS62183540 U JP S62183540U JP 6862886 U JP6862886 U JP 6862886U JP 6862886 U JP6862886 U JP 6862886U JP S62183540 U JPS62183540 U JP S62183540U
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine particles
- laser beam
- gas phase
- phase reaction
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011882 ultra-fine particle Substances 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000010574 gas phase reaction Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Description
第１図は本考案の一実施例に係わる超微粒子製
造装置を示す構成図、第２図は従来の超微粒子製
造装置を示す構成図である。
２１……レーザ反応容器、２２……ガス噴射ノ
ズル、２３……レーザ光照射口、２４……レーザ
光照射窓、２５……超微粒子取出し口、２６……
加熱反応装置、２７……超微粒子回収容器。
FIG. 1 is a block diagram showing an ultrafine particle manufacturing apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional ultrafine particle manufacturing apparatus. 21...Laser reaction vessel, 22...Gas injection nozzle, 23...Laser light irradiation port, 24...Laser light irradiation window, 25...Ultrafine particle extraction port, 26...
Heating reaction device, 27...Ultrafine particle collection container.
Claims (1)
ーザ光照射窓口よりレーザ光を照射し気相反応に
より超微粒子を生成する超微粒子製造装置におい
て、上記気相反応の行なわれる反応容器とこの反
応容器内にて生成される超微粒子を回収する回収
容器との間に加熱室を設けたことを特徴とする超
微粒子製造装置。 In an ultrafine particle manufacturing apparatus that generates ultrafine particles through a gas phase reaction by irradiating a raw material gas supplied from a gas nozzle with a laser beam from a laser beam irradiation window, there is a reaction vessel in which the gas phase reaction takes place, and a An apparatus for producing ultrafine particles, characterized in that a heating chamber is provided between a collection container for collecting ultrafine particles produced by the process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6862886U JPS62183540U (en) | 1986-05-07 | 1986-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6862886U JPS62183540U (en) | 1986-05-07 | 1986-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62183540U true JPS62183540U (en) | 1987-11-21 |
Family
ID=30908621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6862886U Pending JPS62183540U (en) | 1986-05-07 | 1986-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62183540U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005218938A (en) * | 2004-02-04 | 2005-08-18 | Hosokawa Funtai Gijutsu Kenkyusho:Kk | Fine particle manufacturing apparatus |
-
1986
- 1986-05-07 JP JP6862886U patent/JPS62183540U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005218938A (en) * | 2004-02-04 | 2005-08-18 | Hosokawa Funtai Gijutsu Kenkyusho:Kk | Fine particle manufacturing apparatus |
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