JPS62183516U - - Google Patents

Info

Publication number
JPS62183516U
JPS62183516U JP7090486U JP7090486U JPS62183516U JP S62183516 U JPS62183516 U JP S62183516U JP 7090486 U JP7090486 U JP 7090486U JP 7090486 U JP7090486 U JP 7090486U JP S62183516 U JPS62183516 U JP S62183516U
Authority
JP
Japan
Prior art keywords
chamber
gas
slit
flow path
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7090486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7090486U priority Critical patent/JPS62183516U/ja
Publication of JPS62183516U publication Critical patent/JPS62183516U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separating Particles In Gases By Inertia (AREA)
JP7090486U 1986-05-12 1986-05-12 Pending JPS62183516U (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7090486U JPS62183516U (US07223432-20070529-C00017.png) 1986-05-12 1986-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7090486U JPS62183516U (US07223432-20070529-C00017.png) 1986-05-12 1986-05-12

Publications (1)

Publication Number Publication Date
JPS62183516U true JPS62183516U (US07223432-20070529-C00017.png) 1987-11-21

Family

ID=30912968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7090486U Pending JPS62183516U (US07223432-20070529-C00017.png) 1986-05-12 1986-05-12

Country Status (1)

Country Link
JP (1) JPS62183516U (US07223432-20070529-C00017.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005199159A (ja) * 2004-01-15 2005-07-28 Tlv Co Ltd 気液分離器
JP2020076533A (ja) * 2018-11-07 2020-05-21 三菱日立パワーシステムズ株式会社 ドレン排出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4315417Y1 (US07223432-20070529-C00017.png) * 1965-02-12 1968-06-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4315417Y1 (US07223432-20070529-C00017.png) * 1965-02-12 1968-06-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005199159A (ja) * 2004-01-15 2005-07-28 Tlv Co Ltd 気液分離器
JP2020076533A (ja) * 2018-11-07 2020-05-21 三菱日立パワーシステムズ株式会社 ドレン排出装置

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