JPS62182541U - - Google Patents

Info

Publication number

JPS62182541U

JPS62182541U JP7053286U JP7053286U JPS62182541U JP S62182541 U JPS62182541 U JP S62182541U JP 7053286 U JP7053286 U JP 7053286U JP 7053286 U JP7053286 U JP 7053286U JP S62182541 U JPS62182541 U JP S62182541U

Authority

JP

Japan

Prior art keywords

support substrate

plate

semiconductor manufacturing

susceptor plate

wafer

Prior art date

1986-05-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 6
• 238000004519 manufacturing process Methods 0.000 claims 3
• 239000004065 semiconductor Substances 0.000 claims 3
• 239000004020 conductor Substances 0.000 claims 1
• 230000000149 penetrating effect Effects 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1
• 238000000151 deposition Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 230000008021 deposition Effects 0.000 description 1