JPS62181519U - - Google Patents

Info

Publication number
JPS62181519U
JPS62181519U JP7000186U JP7000186U JPS62181519U JP S62181519 U JPS62181519 U JP S62181519U JP 7000186 U JP7000186 U JP 7000186U JP 7000186 U JP7000186 U JP 7000186U JP S62181519 U JPS62181519 U JP S62181519U
Authority
JP
Japan
Prior art keywords
air supply
casing
partition wall
opening area
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7000186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313465Y2 (US07534539-20090519-C00280.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070001U priority Critical patent/JPH0313465Y2/ja
Publication of JPS62181519U publication Critical patent/JPS62181519U/ja
Application granted granted Critical
Publication of JPH0313465Y2 publication Critical patent/JPH0313465Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1986070001U 1986-05-12 1986-05-12 Expired JPH0313465Y2 (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070001U JPH0313465Y2 (US07534539-20090519-C00280.png) 1986-05-12 1986-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070001U JPH0313465Y2 (US07534539-20090519-C00280.png) 1986-05-12 1986-05-12

Publications (2)

Publication Number Publication Date
JPS62181519U true JPS62181519U (US07534539-20090519-C00280.png) 1987-11-18
JPH0313465Y2 JPH0313465Y2 (US07534539-20090519-C00280.png) 1991-03-27

Family

ID=30911236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070001U Expired JPH0313465Y2 (US07534539-20090519-C00280.png) 1986-05-12 1986-05-12

Country Status (1)

Country Link
JP (1) JPH0313465Y2 (US07534539-20090519-C00280.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116300U (ja) * 1982-02-02 1983-08-08 日本電気株式会社 コンベヤ装置
JPS5994840A (ja) * 1982-11-22 1984-05-31 Hitachi Plant Eng & Constr Co Ltd ウエハ搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116300U (ja) * 1982-02-02 1983-08-08 日本電気株式会社 コンベヤ装置
JPS5994840A (ja) * 1982-11-22 1984-05-31 Hitachi Plant Eng & Constr Co Ltd ウエハ搬送装置

Also Published As

Publication number Publication date
JPH0313465Y2 (US07534539-20090519-C00280.png) 1991-03-27

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