JPS62181036U - - Google Patents

Info

Publication number

JPS62181036U

JPS62181036U JP6886486U JP6886486U JPS62181036U JP S62181036 U JPS62181036 U JP S62181036U JP 6886486 U JP6886486 U JP 6886486U JP 6886486 U JP6886486 U JP 6886486U JP S62181036 U JPS62181036 U JP S62181036U

Authority

JP

Japan

Prior art keywords

interdigitated electrodes

acoustic wave

wave device

thin film

surface acoustic

Prior art date

1986-05-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010897 surface acoustic wave method Methods 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2

Cited By (3)