JPS62180944U - - Google Patents

Info

Publication number
JPS62180944U
JPS62180944U JP6981786U JP6981786U JPS62180944U JP S62180944 U JPS62180944 U JP S62180944U JP 6981786 U JP6981786 U JP 6981786U JP 6981786 U JP6981786 U JP 6981786U JP S62180944 U JPS62180944 U JP S62180944U
Authority
JP
Japan
Prior art keywords
stage
plate
thin film
wafers
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6981786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6981786U priority Critical patent/JPS62180944U/ja
Publication of JPS62180944U publication Critical patent/JPS62180944U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP6981786U 1986-05-08 1986-05-08 Pending JPS62180944U (US06277897-20010821-C00009.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6981786U JPS62180944U (US06277897-20010821-C00009.png) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6981786U JPS62180944U (US06277897-20010821-C00009.png) 1986-05-08 1986-05-08

Publications (1)

Publication Number Publication Date
JPS62180944U true JPS62180944U (US06277897-20010821-C00009.png) 1987-11-17

Family

ID=30910890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6981786U Pending JPS62180944U (US06277897-20010821-C00009.png) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPS62180944U (US06277897-20010821-C00009.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001006559A1 (en) * 1999-07-15 2001-01-25 Ibiden Co., Ltd. Wafer prober

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001006559A1 (en) * 1999-07-15 2001-01-25 Ibiden Co., Ltd. Wafer prober

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