JPS62180732U - - Google Patents

Info

Publication number

JPS62180732U

JPS62180732U JP6893686U JP6893686U JPS62180732U JP S62180732 U JPS62180732 U JP S62180732U JP 6893686 U JP6893686 U JP 6893686U JP 6893686 U JP6893686 U JP 6893686U JP S62180732 U JPS62180732 U JP S62180732U

Authority

JP

Japan

Prior art keywords

outer tube

inner tube

substrate

bottom plate

tube

Prior art date

1986-05-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 4
• 239000000463 material Substances 0.000 claims description 2
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1