JPS6217745U - - Google Patents

Info

Publication number
JPS6217745U
JPS6217745U JP1986096396U JP9639686U JPS6217745U JP S6217745 U JPS6217745 U JP S6217745U JP 1986096396 U JP1986096396 U JP 1986096396U JP 9639686 U JP9639686 U JP 9639686U JP S6217745 U JPS6217745 U JP S6217745U
Authority
JP
Japan
Prior art keywords
chamber
air supply
exhaust
duct
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986096396U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986096396U priority Critical patent/JPS6217745U/ja
Publication of JPS6217745U publication Critical patent/JPS6217745U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Duct Arrangements (AREA)
  • Air-Flow Control Members (AREA)
JP1986096396U 1986-06-23 1986-06-23 Pending JPS6217745U (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986096396U JPS6217745U (US06368395-20020409-C00050.png) 1986-06-23 1986-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986096396U JPS6217745U (US06368395-20020409-C00050.png) 1986-06-23 1986-06-23

Publications (1)

Publication Number Publication Date
JPS6217745U true JPS6217745U (US06368395-20020409-C00050.png) 1987-02-02

Family

ID=30962096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986096396U Pending JPS6217745U (US06368395-20020409-C00050.png) 1986-06-23 1986-06-23

Country Status (1)

Country Link
JP (1) JPS6217745U (US06368395-20020409-C00050.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834367B1 (US06368395-20020409-C00050.png) * 1970-12-15 1973-10-20
JPS5717243U (US06368395-20020409-C00050.png) * 1980-07-04 1982-01-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834367B1 (US06368395-20020409-C00050.png) * 1970-12-15 1973-10-20
JPS5717243U (US06368395-20020409-C00050.png) * 1980-07-04 1982-01-28

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