JPS62173752A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS62173752A
JPS62173752A JP1627986A JP1627986A JPS62173752A JP S62173752 A JPS62173752 A JP S62173752A JP 1627986 A JP1627986 A JP 1627986A JP 1627986 A JP1627986 A JP 1627986A JP S62173752 A JPS62173752 A JP S62173752A
Authority
JP
Japan
Prior art keywords
pattern
thin film
film resistor
wiring metal
irregularity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1627986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0553070B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuya Kauchi
加内　一也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1627986A priority Critical patent/JPS62173752A/ja
Publication of JPS62173752A publication Critical patent/JPS62173752A/ja
Publication of JPH0553070B2 publication Critical patent/JPH0553070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP1627986A 1986-01-27 1986-01-27 半導体装置 Granted JPS62173752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1627986A JPS62173752A (ja) 1986-01-27 1986-01-27 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1627986A JPS62173752A (ja) 1986-01-27 1986-01-27 半導体装置

Publications (2)

Publication Number Publication Date
JPS62173752A true JPS62173752A (ja) 1987-07-30
JPH0553070B2 JPH0553070B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-09

Family

ID=11912105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1627986A Granted JPS62173752A (ja) 1986-01-27 1986-01-27 半導体装置

Country Status (1)

Country Link
JP (1) JPS62173752A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012244101A (ja) * 2011-05-24 2012-12-10 Sony Corp 半導体装置
US9799587B2 (en) 2011-05-24 2017-10-24 Sony Corporation Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720163U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-07-08 1982-02-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720163U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-07-08 1982-02-02

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012244101A (ja) * 2011-05-24 2012-12-10 Sony Corp 半導体装置
US9799587B2 (en) 2011-05-24 2017-10-24 Sony Corporation Semiconductor device
US11587857B2 (en) 2011-05-24 2023-02-21 Sony Corporation Semiconductor device
US11626356B2 (en) 2011-05-24 2023-04-11 Sony Group Corporation Semiconductor device
US11923279B2 (en) 2011-05-24 2024-03-05 Sony Group Corporation Semiconductor device

Also Published As

Publication number Publication date
JPH0553070B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-09

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