JPS621735U - - Google Patents

Info

Publication number
JPS621735U
JPS621735U JP9044985U JP9044985U JPS621735U JP S621735 U JPS621735 U JP S621735U JP 9044985 U JP9044985 U JP 9044985U JP 9044985 U JP9044985 U JP 9044985U JP S621735 U JPS621735 U JP S621735U
Authority
JP
Japan
Prior art keywords
gas supply
valve
mass flow
flow controller
bypass line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9044985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9044985U priority Critical patent/JPS621735U/ja
Publication of JPS621735U publication Critical patent/JPS621735U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9044985U 1985-06-15 1985-06-15 Pending JPS621735U (US20030204162A1-20031030-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9044985U JPS621735U (US20030204162A1-20031030-M00002.png) 1985-06-15 1985-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9044985U JPS621735U (US20030204162A1-20031030-M00002.png) 1985-06-15 1985-06-15

Publications (1)

Publication Number Publication Date
JPS621735U true JPS621735U (US20030204162A1-20031030-M00002.png) 1987-01-08

Family

ID=30645450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9044985U Pending JPS621735U (US20030204162A1-20031030-M00002.png) 1985-06-15 1985-06-15

Country Status (1)

Country Link
JP (1) JPS621735U (US20030204162A1-20031030-M00002.png)

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