JPS62170634U - - Google Patents

Info

Publication number

JPS62170634U

JPS62170634U JP5892186U JP5892186U JPS62170634U JP S62170634 U JPS62170634 U JP S62170634U JP 5892186 U JP5892186 U JP 5892186U JP 5892186 U JP5892186 U JP 5892186U JP S62170634 U JPS62170634 U JP S62170634U

Authority

JP

Japan

Prior art keywords

chip

semiconductor wafer

fastening

metal plate

peripheral edge

Prior art date

1986-04-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000010408 film Substances 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1