JPS62170451U - - Google Patents

Info

Publication number
JPS62170451U
JPS62170451U JP5754086U JP5754086U JPS62170451U JP S62170451 U JPS62170451 U JP S62170451U JP 5754086 U JP5754086 U JP 5754086U JP 5754086 U JP5754086 U JP 5754086U JP S62170451 U JPS62170451 U JP S62170451U
Authority
JP
Japan
Prior art keywords
valve housing
valve
valve plate
pressed against
close
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5754086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5754086U priority Critical patent/JPS62170451U/ja
Publication of JPS62170451U publication Critical patent/JPS62170451U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP5754086U 1986-04-18 1986-04-18 Pending JPS62170451U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5754086U JPS62170451U (US20020051482A1-20020502-M00012.png) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5754086U JPS62170451U (US20020051482A1-20020502-M00012.png) 1986-04-18 1986-04-18

Publications (1)

Publication Number Publication Date
JPS62170451U true JPS62170451U (US20020051482A1-20020502-M00012.png) 1987-10-29

Family

ID=30887340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5754086U Pending JPS62170451U (US20020051482A1-20020502-M00012.png) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPS62170451U (US20020051482A1-20020502-M00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006052846A (ja) * 2004-08-13 2006-02-23 Vat Holding Ag 二つの真空室間に配置される真空バルブの制御方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324529B2 (US20020051482A1-20020502-M00012.png) * 1975-02-03 1978-07-21
JPS5650867B2 (US20020051482A1-20020502-M00012.png) * 1976-07-05 1981-12-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324529B2 (US20020051482A1-20020502-M00012.png) * 1975-02-03 1978-07-21
JPS5650867B2 (US20020051482A1-20020502-M00012.png) * 1976-07-05 1981-12-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006052846A (ja) * 2004-08-13 2006-02-23 Vat Holding Ag 二つの真空室間に配置される真空バルブの制御方法

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