JPS62169756U - - Google Patents

Info

Publication number

JPS62169756U

JPS62169756U JP5865686U JP5865686U JPS62169756U JP S62169756 U JPS62169756 U JP S62169756U JP 5865686 U JP5865686 U JP 5865686U JP 5865686 U JP5865686 U JP 5865686U JP S62169756 U JPS62169756 U JP S62169756U

Authority

JP

Japan

Prior art keywords

horizontally

positioning table

sliding nozzle

movable vertically

rotated horizontally

Prior art date

1986-04-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 2
• 230000003028 elevating effect Effects 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 1