JPS62167535U - - Google Patents

Info

Publication number
JPS62167535U
JPS62167535U JP5735686U JP5735686U JPS62167535U JP S62167535 U JPS62167535 U JP S62167535U JP 5735686 U JP5735686 U JP 5735686U JP 5735686 U JP5735686 U JP 5735686U JP S62167535 U JPS62167535 U JP S62167535U
Authority
JP
Japan
Prior art keywords
processing
chamber
processing chamber
supplied
processing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5735686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5735686U priority Critical patent/JPS62167535U/ja
Publication of JPS62167535U publication Critical patent/JPS62167535U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Threshing Machine Elements (AREA)
JP5735686U 1986-04-16 1986-04-16 Pending JPS62167535U (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5735686U JPS62167535U (US07321065-20080122-C00160.png) 1986-04-16 1986-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5735686U JPS62167535U (US07321065-20080122-C00160.png) 1986-04-16 1986-04-16

Publications (1)

Publication Number Publication Date
JPS62167535U true JPS62167535U (US07321065-20080122-C00160.png) 1987-10-24

Family

ID=30886981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5735686U Pending JPS62167535U (US07321065-20080122-C00160.png) 1986-04-16 1986-04-16

Country Status (1)

Country Link
JP (1) JPS62167535U (US07321065-20080122-C00160.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835101A (US07321065-20080122-C00160.png) * 1971-09-07 1973-05-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835101A (US07321065-20080122-C00160.png) * 1971-09-07 1973-05-23

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