JPS62167142U - - Google Patents

Info

Publication number
JPS62167142U
JPS62167142U JP5635686U JP5635686U JPS62167142U JP S62167142 U JPS62167142 U JP S62167142U JP 5635686 U JP5635686 U JP 5635686U JP 5635686 U JP5635686 U JP 5635686U JP S62167142 U JPS62167142 U JP S62167142U
Authority
JP
Japan
Prior art keywords
gas
filter
upstream
downstream
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5635686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5635686U priority Critical patent/JPS62167142U/ja
Publication of JPS62167142U publication Critical patent/JPS62167142U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP5635686U 1986-04-15 1986-04-15 Pending JPS62167142U (US07655688-20100202-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5635686U JPS62167142U (US07655688-20100202-C00010.png) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5635686U JPS62167142U (US07655688-20100202-C00010.png) 1986-04-15 1986-04-15

Publications (1)

Publication Number Publication Date
JPS62167142U true JPS62167142U (US07655688-20100202-C00010.png) 1987-10-23

Family

ID=30885093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5635686U Pending JPS62167142U (US07655688-20100202-C00010.png) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPS62167142U (US07655688-20100202-C00010.png)

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