JPS62163949U - - Google Patents

Info

Publication number
JPS62163949U
JPS62163949U JP5208886U JP5208886U JPS62163949U JP S62163949 U JPS62163949 U JP S62163949U JP 5208886 U JP5208886 U JP 5208886U JP 5208886 U JP5208886 U JP 5208886U JP S62163949 U JPS62163949 U JP S62163949U
Authority
JP
Japan
Prior art keywords
wafer storage
storage carrier
hole
notch
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5208886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5208886U priority Critical patent/JPS62163949U/ja
Publication of JPS62163949U publication Critical patent/JPS62163949U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP5208886U 1986-04-09 1986-04-09 Pending JPS62163949U (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5208886U JPS62163949U (US07652168-20100126-C00068.png) 1986-04-09 1986-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5208886U JPS62163949U (US07652168-20100126-C00068.png) 1986-04-09 1986-04-09

Publications (1)

Publication Number Publication Date
JPS62163949U true JPS62163949U (US07652168-20100126-C00068.png) 1987-10-17

Family

ID=30876944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5208886U Pending JPS62163949U (US07652168-20100126-C00068.png) 1986-04-09 1986-04-09

Country Status (1)

Country Link
JP (1) JPS62163949U (US07652168-20100126-C00068.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153517U (US07652168-20100126-C00068.png) * 1987-03-28 1988-10-07
JPH0497347U (US07652168-20100126-C00068.png) * 1990-06-01 1992-08-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153517U (US07652168-20100126-C00068.png) * 1987-03-28 1988-10-07
JPH0497347U (US07652168-20100126-C00068.png) * 1990-06-01 1992-08-24

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