JPS62163948U - - Google Patents

Info

Publication number
JPS62163948U
JPS62163948U JP5208586U JP5208586U JPS62163948U JP S62163948 U JPS62163948 U JP S62163948U JP 5208586 U JP5208586 U JP 5208586U JP 5208586 U JP5208586 U JP 5208586U JP S62163948 U JPS62163948 U JP S62163948U
Authority
JP
Japan
Prior art keywords
carrier
groove
wafer
partition wall
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5208586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5208586U priority Critical patent/JPS62163948U/ja
Publication of JPS62163948U publication Critical patent/JPS62163948U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP5208586U 1986-04-09 1986-04-09 Pending JPS62163948U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5208586U JPS62163948U (US20030204162A1-20031030-M00001.png) 1986-04-09 1986-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5208586U JPS62163948U (US20030204162A1-20031030-M00001.png) 1986-04-09 1986-04-09

Publications (1)

Publication Number Publication Date
JPS62163948U true JPS62163948U (US20030204162A1-20031030-M00001.png) 1987-10-17

Family

ID=30876938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5208586U Pending JPS62163948U (US20030204162A1-20031030-M00001.png) 1986-04-09 1986-04-09

Country Status (1)

Country Link
JP (1) JPS62163948U (US20030204162A1-20031030-M00001.png)

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