JPS62162834U - - Google Patents

Info

Publication number
JPS62162834U
JPS62162834U JP5134686U JP5134686U JPS62162834U JP S62162834 U JPS62162834 U JP S62162834U JP 5134686 U JP5134686 U JP 5134686U JP 5134686 U JP5134686 U JP 5134686U JP S62162834 U JPS62162834 U JP S62162834U
Authority
JP
Japan
Prior art keywords
pressure cvd
low pressure
cvd apparatus
gas inlet
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5134686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5134686U priority Critical patent/JPS62162834U/ja
Publication of JPS62162834U publication Critical patent/JPS62162834U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5134686U 1986-04-04 1986-04-04 Pending JPS62162834U (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5134686U JPS62162834U (US20020128544A1-20020912-P00008.png) 1986-04-04 1986-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5134686U JPS62162834U (US20020128544A1-20020912-P00008.png) 1986-04-04 1986-04-04

Publications (1)

Publication Number Publication Date
JPS62162834U true JPS62162834U (US20020128544A1-20020912-P00008.png) 1987-10-16

Family

ID=30875518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5134686U Pending JPS62162834U (US20020128544A1-20020912-P00008.png) 1986-04-04 1986-04-04

Country Status (1)

Country Link
JP (1) JPS62162834U (US20020128544A1-20020912-P00008.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105408696A (zh) * 2014-06-30 2016-03-16 日立空调·家用电器株式会社 空气调节装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105408696A (zh) * 2014-06-30 2016-03-16 日立空调·家用电器株式会社 空气调节装置
CN105408696B (zh) * 2014-06-30 2018-07-06 日立江森自控空调有限公司 空气调节装置

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