JPS62162237U - - Google Patents

Info

Publication number

JPS62162237U

JPS62162237U JP5065486U JP5065486U JPS62162237U JP S62162237 U JPS62162237 U JP S62162237U JP 5065486 U JP5065486 U JP 5065486U JP 5065486 U JP5065486 U JP 5065486U JP S62162237 U JPS62162237 U JP S62162237U

Authority

JP

Japan

Prior art keywords

stepped portion

pedestal

ceramic

supporting frame

utility

Prior art date

1986-04-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 2
• 229910052751 metal Inorganic materials 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 1
• 230000001590 oxidative effect Effects 0.000 claims 1
• 229910052574 oxide ceramic Inorganic materials 0.000 claims 1
• 239000000919 ceramic Substances 0.000 description 3
• 239000000758 substrate Substances 0.000 description 3
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1

Cited By (1)