JPS62161964U - - Google Patents
Info
- Publication number
- JPS62161964U JPS62161964U JP4911086U JP4911086U JPS62161964U JP S62161964 U JPS62161964 U JP S62161964U JP 4911086 U JP4911086 U JP 4911086U JP 4911086 U JP4911086 U JP 4911086U JP S62161964 U JPS62161964 U JP S62161964U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- nozzle
- polishing
- polishing head
- polishing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000007921 spray Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4911086U JPS62161964U (de) | 1986-04-02 | 1986-04-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4911086U JPS62161964U (de) | 1986-04-02 | 1986-04-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62161964U true JPS62161964U (de) | 1987-10-15 |
Family
ID=30871254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4911086U Pending JPS62161964U (de) | 1986-04-02 | 1986-04-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62161964U (de) |
-
1986
- 1986-04-02 JP JP4911086U patent/JPS62161964U/ja active Pending