JPS62161964U - - Google Patents

Info

Publication number
JPS62161964U
JPS62161964U JP4911086U JP4911086U JPS62161964U JP S62161964 U JPS62161964 U JP S62161964U JP 4911086 U JP4911086 U JP 4911086U JP 4911086 U JP4911086 U JP 4911086U JP S62161964 U JPS62161964 U JP S62161964U
Authority
JP
Japan
Prior art keywords
disk
nozzle
polishing
polishing head
polishing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4911086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4911086U priority Critical patent/JPS62161964U/ja
Publication of JPS62161964U publication Critical patent/JPS62161964U/ja
Pending legal-status Critical Current

Links

JP4911086U 1986-04-02 1986-04-02 Pending JPS62161964U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4911086U JPS62161964U (US07655688-20100202-C00086.png) 1986-04-02 1986-04-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4911086U JPS62161964U (US07655688-20100202-C00086.png) 1986-04-02 1986-04-02

Publications (1)

Publication Number Publication Date
JPS62161964U true JPS62161964U (US07655688-20100202-C00086.png) 1987-10-15

Family

ID=30871254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4911086U Pending JPS62161964U (US07655688-20100202-C00086.png) 1986-04-02 1986-04-02

Country Status (1)

Country Link
JP (1) JPS62161964U (US07655688-20100202-C00086.png)

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