JPS62158914U - - Google Patents

Info

Publication number

JPS62158914U

JPS62158914U JP4564886U JP4564886U JPS62158914U JP S62158914 U JPS62158914 U JP S62158914U JP 4564886 U JP4564886 U JP 4564886U JP 4564886 U JP4564886 U JP 4564886U JP S62158914 U JPS62158914 U JP S62158914U

Authority

JP

Japan

Prior art keywords

acoustic wave

surface acoustic

electrically connected

resonance peaks

wave resonator

Prior art date

1986-03-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010897 surface acoustic wave method Methods 0.000 claims description 13
• 238000006243 chemical reaction Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 230000005284 excitation Effects 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1