JPS62157137U - - Google Patents

Info

Publication number
JPS62157137U
JPS62157137U JP4405586U JP4405586U JPS62157137U JP S62157137 U JPS62157137 U JP S62157137U JP 4405586 U JP4405586 U JP 4405586U JP 4405586 U JP4405586 U JP 4405586U JP S62157137 U JPS62157137 U JP S62157137U
Authority
JP
Japan
Prior art keywords
electrode
reactive ion
ion etching
etching apparatus
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4405586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4405586U priority Critical patent/JPS62157137U/ja
Publication of JPS62157137U publication Critical patent/JPS62157137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4405586U 1986-03-26 1986-03-26 Pending JPS62157137U (US06330241-20011211-M00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4405586U JPS62157137U (US06330241-20011211-M00004.png) 1986-03-26 1986-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4405586U JPS62157137U (US06330241-20011211-M00004.png) 1986-03-26 1986-03-26

Publications (1)

Publication Number Publication Date
JPS62157137U true JPS62157137U (US06330241-20011211-M00004.png) 1987-10-06

Family

ID=30861499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4405586U Pending JPS62157137U (US06330241-20011211-M00004.png) 1986-03-26 1986-03-26

Country Status (1)

Country Link
JP (1) JPS62157137U (US06330241-20011211-M00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739431B2 (US06330241-20011211-M00004.png) * 1976-12-30 1982-08-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739431B2 (US06330241-20011211-M00004.png) * 1976-12-30 1982-08-21

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