JPS62154640U - - Google Patents
Info
- Publication number
- JPS62154640U JPS62154640U JP4115386U JP4115386U JPS62154640U JP S62154640 U JPS62154640 U JP S62154640U JP 4115386 U JP4115386 U JP 4115386U JP 4115386 U JP4115386 U JP 4115386U JP S62154640 U JPS62154640 U JP S62154640U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- substrate
- ohmic electrode
- mounting table
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4115386U JPS62154640U (cs) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4115386U JPS62154640U (cs) | 1986-03-20 | 1986-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62154640U true JPS62154640U (cs) | 1987-10-01 |
Family
ID=30855889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4115386U Pending JPS62154640U (cs) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62154640U (cs) |
-
1986
- 1986-03-20 JP JP4115386U patent/JPS62154640U/ja active Pending
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