JPS62153232U - - Google Patents

Info

Publication number
JPS62153232U
JPS62153232U JP4086986U JP4086986U JPS62153232U JP S62153232 U JPS62153232 U JP S62153232U JP 4086986 U JP4086986 U JP 4086986U JP 4086986 U JP4086986 U JP 4086986U JP S62153232 U JPS62153232 U JP S62153232U
Authority
JP
Japan
Prior art keywords
wafer cassette
truck
moves
carrier
tilting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4086986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4086986U priority Critical patent/JPS62153232U/ja
Publication of JPS62153232U publication Critical patent/JPS62153232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP4086986U 1986-03-20 1986-03-20 Pending JPS62153232U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4086986U JPS62153232U (US20100012521A1-20100121-C00001.png) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4086986U JPS62153232U (US20100012521A1-20100121-C00001.png) 1986-03-20 1986-03-20

Publications (1)

Publication Number Publication Date
JPS62153232U true JPS62153232U (US20100012521A1-20100121-C00001.png) 1987-09-29

Family

ID=30855342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4086986U Pending JPS62153232U (US20100012521A1-20100121-C00001.png) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS62153232U (US20100012521A1-20100121-C00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5587652A (en) * 1978-12-27 1980-07-02 Tokyo Shibaura Electric Co Dusttproof conveyor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5587652A (en) * 1978-12-27 1980-07-02 Tokyo Shibaura Electric Co Dusttproof conveyor

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