JPS62153221U - - Google Patents

Info

Publication number
JPS62153221U
JPS62153221U JP3834986U JP3834986U JPS62153221U JP S62153221 U JPS62153221 U JP S62153221U JP 3834986 U JP3834986 U JP 3834986U JP 3834986 U JP3834986 U JP 3834986U JP S62153221 U JPS62153221 U JP S62153221U
Authority
JP
Japan
Prior art keywords
shaft
rotation
fixed
center
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3834986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3834986U priority Critical patent/JPS62153221U/ja
Publication of JPS62153221U publication Critical patent/JPS62153221U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP3834986U 1986-03-18 1986-03-18 Pending JPS62153221U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3834986U JPS62153221U (US20100223739A1-20100909-C00005.png) 1986-03-18 1986-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3834986U JPS62153221U (US20100223739A1-20100909-C00005.png) 1986-03-18 1986-03-18

Publications (1)

Publication Number Publication Date
JPS62153221U true JPS62153221U (US20100223739A1-20100909-C00005.png) 1987-09-29

Family

ID=30850508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3834986U Pending JPS62153221U (US20100223739A1-20100909-C00005.png) 1986-03-18 1986-03-18

Country Status (1)

Country Link
JP (1) JPS62153221U (US20100223739A1-20100909-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05174776A (ja) * 1991-12-20 1993-07-13 Hitachi Ltd 半導体処理装置のロードロック室

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05174776A (ja) * 1991-12-20 1993-07-13 Hitachi Ltd 半導体処理装置のロードロック室

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