JPS62152519A - ハロゲン系廃ガスの乾式処理方法 - Google Patents

ハロゲン系廃ガスの乾式処理方法

Info

Publication number
JPS62152519A
JPS62152519A JP60297598A JP29759885A JPS62152519A JP S62152519 A JPS62152519 A JP S62152519A JP 60297598 A JP60297598 A JP 60297598A JP 29759885 A JP29759885 A JP 29759885A JP S62152519 A JPS62152519 A JP S62152519A
Authority
JP
Japan
Prior art keywords
gas
waste gas
halogen
soda lime
dry treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60297598A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6347497B2 (enrdf_load_stackoverflow
Inventor
Takao Yagi
八木 孝夫
Chitoshi Nogami
千俊 野上
Kunihiko Koike
国彦 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP60297598A priority Critical patent/JPS62152519A/ja
Publication of JPS62152519A publication Critical patent/JPS62152519A/ja
Publication of JPS6347497B2 publication Critical patent/JPS6347497B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP60297598A 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法 Granted JPS62152519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60297598A JPS62152519A (ja) 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60297598A JPS62152519A (ja) 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法

Publications (2)

Publication Number Publication Date
JPS62152519A true JPS62152519A (ja) 1987-07-07
JPS6347497B2 JPS6347497B2 (enrdf_load_stackoverflow) 1988-09-22

Family

ID=17848631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60297598A Granted JPS62152519A (ja) 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法

Country Status (1)

Country Link
JP (1) JPS62152519A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03229618A (ja) * 1990-02-05 1991-10-11 Ebara Res Co Ltd C1f▲下3▼を含有する排ガスの処理方法
US5213767A (en) * 1988-06-04 1993-05-25 Boc Limited Dry exhaust gas conditioning
US5290524A (en) * 1989-09-14 1994-03-01 Johnson & Johnson Method and apparatus for chlorine dioxide manufacture
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
JPH09267027A (ja) * 1996-03-29 1997-10-14 Japan Pionics Co Ltd 有害ガスの浄化剤
WO1999052817A1 (en) * 1998-04-09 1999-10-21 Uhp Materials, Inc. Preparation and purification of diborane
EP0962248A1 (en) * 1998-06-02 1999-12-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for CIF3 containing exhaust gases.
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
JP2009215588A (ja) * 2008-03-10 2009-09-24 Toyo Tanso Kk フッ素ガス発生装置
JP2009285656A (ja) * 2009-09-01 2009-12-10 Hitachi Ltd Hf含有ガスの乾式処理装置及び処理方法
JP2018103156A (ja) * 2016-12-28 2018-07-05 大陽日酸株式会社 排ガス処理用カラム、排ガス処理装置及び排ガス処理方法
JP2020028826A (ja) * 2018-08-21 2020-02-27 株式会社荏原製作所 希ガス回収装置および希ガス回収方法

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5213767A (en) * 1988-06-04 1993-05-25 Boc Limited Dry exhaust gas conditioning
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
US5290524A (en) * 1989-09-14 1994-03-01 Johnson & Johnson Method and apparatus for chlorine dioxide manufacture
US5326546A (en) * 1989-09-14 1994-07-05 Iolab Corporation Method and apparatus for chlorine dioxide manufacture
JPH03229618A (ja) * 1990-02-05 1991-10-11 Ebara Res Co Ltd C1f▲下3▼を含有する排ガスの処理方法
JPH09267027A (ja) * 1996-03-29 1997-10-14 Japan Pionics Co Ltd 有害ガスの浄化剤
US6165434A (en) * 1998-04-09 2000-12-26 Uhp Materials, Inc Purification of diborane
WO1999052817A1 (en) * 1998-04-09 1999-10-21 Uhp Materials, Inc. Preparation and purification of diborane
AU749603B2 (en) * 1998-04-09 2002-06-27 Honeywell Intellectual Properties Inc. Preparation and purification of diborane
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
EP0962248A1 (en) * 1998-06-02 1999-12-08 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for CIF3 containing exhaust gases.
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
JP2009215588A (ja) * 2008-03-10 2009-09-24 Toyo Tanso Kk フッ素ガス発生装置
JP2009285656A (ja) * 2009-09-01 2009-12-10 Hitachi Ltd Hf含有ガスの乾式処理装置及び処理方法
JP2018103156A (ja) * 2016-12-28 2018-07-05 大陽日酸株式会社 排ガス処理用カラム、排ガス処理装置及び排ガス処理方法
JP2020028826A (ja) * 2018-08-21 2020-02-27 株式会社荏原製作所 希ガス回収装置および希ガス回収方法

Also Published As

Publication number Publication date
JPS6347497B2 (enrdf_load_stackoverflow) 1988-09-22

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