JPS62152519A - ハロゲン系廃ガスの乾式処理方法 - Google Patents
ハロゲン系廃ガスの乾式処理方法Info
- Publication number
- JPS62152519A JPS62152519A JP60297598A JP29759885A JPS62152519A JP S62152519 A JPS62152519 A JP S62152519A JP 60297598 A JP60297598 A JP 60297598A JP 29759885 A JP29759885 A JP 29759885A JP S62152519 A JPS62152519 A JP S62152519A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- waste gas
- halogen
- soda lime
- dry treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60297598A JPS62152519A (ja) | 1985-12-26 | 1985-12-26 | ハロゲン系廃ガスの乾式処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60297598A JPS62152519A (ja) | 1985-12-26 | 1985-12-26 | ハロゲン系廃ガスの乾式処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62152519A true JPS62152519A (ja) | 1987-07-07 |
| JPS6347497B2 JPS6347497B2 (enrdf_load_stackoverflow) | 1988-09-22 |
Family
ID=17848631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60297598A Granted JPS62152519A (ja) | 1985-12-26 | 1985-12-26 | ハロゲン系廃ガスの乾式処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62152519A (enrdf_load_stackoverflow) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03229618A (ja) * | 1990-02-05 | 1991-10-11 | Ebara Res Co Ltd | C1f▲下3▼を含有する排ガスの処理方法 |
| US5213767A (en) * | 1988-06-04 | 1993-05-25 | Boc Limited | Dry exhaust gas conditioning |
| US5290524A (en) * | 1989-09-14 | 1994-03-01 | Johnson & Johnson | Method and apparatus for chlorine dioxide manufacture |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| JPH09267027A (ja) * | 1996-03-29 | 1997-10-14 | Japan Pionics Co Ltd | 有害ガスの浄化剤 |
| WO1999052817A1 (en) * | 1998-04-09 | 1999-10-21 | Uhp Materials, Inc. | Preparation and purification of diborane |
| EP0962248A1 (en) * | 1998-06-02 | 1999-12-08 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for CIF3 containing exhaust gases. |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| JP2009215588A (ja) * | 2008-03-10 | 2009-09-24 | Toyo Tanso Kk | フッ素ガス発生装置 |
| JP2009285656A (ja) * | 2009-09-01 | 2009-12-10 | Hitachi Ltd | Hf含有ガスの乾式処理装置及び処理方法 |
| JP2018103156A (ja) * | 2016-12-28 | 2018-07-05 | 大陽日酸株式会社 | 排ガス処理用カラム、排ガス処理装置及び排ガス処理方法 |
| JP2020028826A (ja) * | 2018-08-21 | 2020-02-27 | 株式会社荏原製作所 | 希ガス回収装置および希ガス回収方法 |
-
1985
- 1985-12-26 JP JP60297598A patent/JPS62152519A/ja active Granted
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5213767A (en) * | 1988-06-04 | 1993-05-25 | Boc Limited | Dry exhaust gas conditioning |
| US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
| US5290524A (en) * | 1989-09-14 | 1994-03-01 | Johnson & Johnson | Method and apparatus for chlorine dioxide manufacture |
| US5326546A (en) * | 1989-09-14 | 1994-07-05 | Iolab Corporation | Method and apparatus for chlorine dioxide manufacture |
| JPH03229618A (ja) * | 1990-02-05 | 1991-10-11 | Ebara Res Co Ltd | C1f▲下3▼を含有する排ガスの処理方法 |
| JPH09267027A (ja) * | 1996-03-29 | 1997-10-14 | Japan Pionics Co Ltd | 有害ガスの浄化剤 |
| US6165434A (en) * | 1998-04-09 | 2000-12-26 | Uhp Materials, Inc | Purification of diborane |
| WO1999052817A1 (en) * | 1998-04-09 | 1999-10-21 | Uhp Materials, Inc. | Preparation and purification of diborane |
| AU749603B2 (en) * | 1998-04-09 | 2002-06-27 | Honeywell Intellectual Properties Inc. | Preparation and purification of diborane |
| US6060034A (en) * | 1998-06-02 | 2000-05-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for ClF3 containing exhaust gases |
| EP0962248A1 (en) * | 1998-06-02 | 1999-12-08 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Abatement system for CIF3 containing exhaust gases. |
| US6309618B1 (en) | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
| JP2009215588A (ja) * | 2008-03-10 | 2009-09-24 | Toyo Tanso Kk | フッ素ガス発生装置 |
| JP2009285656A (ja) * | 2009-09-01 | 2009-12-10 | Hitachi Ltd | Hf含有ガスの乾式処理装置及び処理方法 |
| JP2018103156A (ja) * | 2016-12-28 | 2018-07-05 | 大陽日酸株式会社 | 排ガス処理用カラム、排ガス処理装置及び排ガス処理方法 |
| JP2020028826A (ja) * | 2018-08-21 | 2020-02-27 | 株式会社荏原製作所 | 希ガス回収装置および希ガス回収方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347497B2 (enrdf_load_stackoverflow) | 1988-09-22 |
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