JPS62152475U - - Google Patents

Info

Publication number

JPS62152475U

JPS62152475U JP4018386U JP4018386U JPS62152475U JP S62152475 U JPS62152475 U JP S62152475U JP 4018386 U JP4018386 U JP 4018386U JP 4018386 U JP4018386 U JP 4018386U JP S62152475 U JPS62152475 U JP S62152475U

Authority

JP

Japan

Prior art keywords

alumina substrate

slit

dividing

slit structure

carved

Prior art date

1986-03-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 6
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1