JPS62152455U - - Google Patents

Info

Publication number
JPS62152455U
JPS62152455U JP3973386U JP3973386U JPS62152455U JP S62152455 U JPS62152455 U JP S62152455U JP 3973386 U JP3973386 U JP 3973386U JP 3973386 U JP3973386 U JP 3973386U JP S62152455 U JPS62152455 U JP S62152455U
Authority
JP
Japan
Prior art keywords
semiconductor element
dry gas
cooled
cooling
heat transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3973386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3973386U priority Critical patent/JPS62152455U/ja
Publication of JPS62152455U publication Critical patent/JPS62152455U/ja
Pending legal-status Critical Current

Links

JP3973386U 1986-03-20 1986-03-20 Pending JPS62152455U (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3973386U JPS62152455U (US07968547-20110628-C00004.png) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3973386U JPS62152455U (US07968547-20110628-C00004.png) 1986-03-20 1986-03-20

Publications (1)

Publication Number Publication Date
JPS62152455U true JPS62152455U (US07968547-20110628-C00004.png) 1987-09-28

Family

ID=30853177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3973386U Pending JPS62152455U (US07968547-20110628-C00004.png) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS62152455U (US07968547-20110628-C00004.png)

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