JPS62152429U - - Google Patents

Info

Publication number
JPS62152429U
JPS62152429U JP4009486U JP4009486U JPS62152429U JP S62152429 U JPS62152429 U JP S62152429U JP 4009486 U JP4009486 U JP 4009486U JP 4009486 U JP4009486 U JP 4009486U JP S62152429 U JPS62152429 U JP S62152429U
Authority
JP
Japan
Prior art keywords
sheet
dust prevention
opening
processing apparatus
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4009486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4009486U priority Critical patent/JPS62152429U/ja
Publication of JPS62152429U publication Critical patent/JPS62152429U/ja
Pending legal-status Critical Current

Links

JP4009486U 1986-03-19 1986-03-19 Pending JPS62152429U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4009486U JPS62152429U (US07922777-20110412-C00004.png) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4009486U JPS62152429U (US07922777-20110412-C00004.png) 1986-03-19 1986-03-19

Publications (1)

Publication Number Publication Date
JPS62152429U true JPS62152429U (US07922777-20110412-C00004.png) 1987-09-28

Family

ID=30853869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4009486U Pending JPS62152429U (US07922777-20110412-C00004.png) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPS62152429U (US07922777-20110412-C00004.png)

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