JPS6214935B2 - - Google Patents

Info

Publication number
JPS6214935B2
JPS6214935B2 JP54129985A JP12998579A JPS6214935B2 JP S6214935 B2 JPS6214935 B2 JP S6214935B2 JP 54129985 A JP54129985 A JP 54129985A JP 12998579 A JP12998579 A JP 12998579A JP S6214935 B2 JPS6214935 B2 JP S6214935B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54129985A
Other versions
JPS5655041A (en
Inventor
Sunao Ishihara
Eitaro Kawaguchi
Original Assignee
Nippon Telegraph & Telephone
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph & Telephone filed Critical Nippon Telegraph & Telephone
Priority to JP54129985A priority Critical patent/JPS6214935B2/ja
Publication of JPS5655041A publication Critical patent/JPS5655041A/en
Publication of JPS6214935B2 publication Critical patent/JPS6214935B2/ja
Application status is Expired legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
JP54129985A 1979-10-11 1979-10-11 Expired JPS6214935B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54129985A JPS6214935B2 (en) 1979-10-11 1979-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54129985A JPS6214935B2 (en) 1979-10-11 1979-10-11

Publications (2)

Publication Number Publication Date
JPS5655041A JPS5655041A (en) 1981-05-15
JPS6214935B2 true JPS6214935B2 (en) 1987-04-04

Family

ID=15023299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54129985A Expired JPS6214935B2 (en) 1979-10-11 1979-10-11

Country Status (1)

Country Link
JP (1) JPS6214935B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2538923B1 (en) * 1982-12-30 1985-03-08 Thomson Csf
JP2644692B2 (en) * 1995-01-30 1997-08-25 キヤノン株式会社 X-ray transfer device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140488A (en) * 1975-05-30 1976-12-03 Hitachi Ltd Mask alignment device
JPS524177A (en) * 1975-06-27 1977-01-13 Toshiba Corp Automatic mask aligning method
JPS5318970A (en) * 1976-08-05 1978-02-21 Siemens Ag Method of aligning relative position of substrate and photo mask
JPS5336998A (en) * 1976-09-15 1978-04-05 Fuaburitsuku Nat Erusutaru Sa Sport gun

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140488A (en) * 1975-05-30 1976-12-03 Hitachi Ltd Mask alignment device
JPS524177A (en) * 1975-06-27 1977-01-13 Toshiba Corp Automatic mask aligning method
JPS5318970A (en) * 1976-08-05 1978-02-21 Siemens Ag Method of aligning relative position of substrate and photo mask
JPS5336998A (en) * 1976-09-15 1978-04-05 Fuaburitsuku Nat Erusutaru Sa Sport gun

Also Published As

Publication number Publication date
JPS5655041A (en) 1981-05-15

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