JPS62149158U - - Google Patents

Info

Publication number

JPS62149158U

JPS62149158U JP3638986U JP3638986U JPS62149158U JP S62149158 U JPS62149158 U JP S62149158U JP 3638986 U JP3638986 U JP 3638986U JP 3638986 U JP3638986 U JP 3638986U JP S62149158 U JPS62149158 U JP S62149158U

Authority

JP

Japan

Prior art keywords

glass tube

electrode

metal film

insulating

deposited

Prior art date

1986-03-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011521 glass Substances 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 3
• 229910052751 metal Inorganic materials 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 3
• 230000005855 radiation Effects 0.000 claims description 3
• 239000011261 inert gas Substances 0.000 claims description 2
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
• 229910052721 tungsten Inorganic materials 0.000 claims 1
• 239000010937 tungsten Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 230000035945 sensitivity Effects 0.000 description 1

Cited By (1)