JPS62149043U - - Google Patents

Info

Publication number
JPS62149043U
JPS62149043U JP1986036143U JP3614386U JPS62149043U JP S62149043 U JPS62149043 U JP S62149043U JP 1986036143 U JP1986036143 U JP 1986036143U JP 3614386 U JP3614386 U JP 3614386U JP S62149043 U JPS62149043 U JP S62149043U
Authority
JP
Japan
Prior art keywords
pellicle body
frame
pellicle
antireflection layer
main part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986036143U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529473Y2 (US06653308-20031125-C00197.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986036143U priority Critical patent/JPH0529473Y2/ja
Publication of JPS62149043U publication Critical patent/JPS62149043U/ja
Application granted granted Critical
Publication of JPH0529473Y2 publication Critical patent/JPH0529473Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986036143U 1986-03-14 1986-03-14 Expired - Lifetime JPH0529473Y2 (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986036143U JPH0529473Y2 (US06653308-20031125-C00197.png) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986036143U JPH0529473Y2 (US06653308-20031125-C00197.png) 1986-03-14 1986-03-14

Publications (2)

Publication Number Publication Date
JPS62149043U true JPS62149043U (US06653308-20031125-C00197.png) 1987-09-21
JPH0529473Y2 JPH0529473Y2 (US06653308-20031125-C00197.png) 1993-07-28

Family

ID=30846274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986036143U Expired - Lifetime JPH0529473Y2 (US06653308-20031125-C00197.png) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPH0529473Y2 (US06653308-20031125-C00197.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03170901A (ja) * 1989-09-06 1991-07-24 E I Du Pont De Nemours & Co 反射防止薄膜

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237450A (ja) * 1984-05-11 1985-11-26 Asahi Chem Ind Co Ltd 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237450A (ja) * 1984-05-11 1985-11-26 Asahi Chem Ind Co Ltd 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03170901A (ja) * 1989-09-06 1991-07-24 E I Du Pont De Nemours & Co 反射防止薄膜

Also Published As

Publication number Publication date
JPH0529473Y2 (US06653308-20031125-C00197.png) 1993-07-28

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