JPS62148575U - - Google Patents

Info

Publication number

JPS62148575U

JPS62148575U JP3539486U JP3539486U JPS62148575U JP S62148575 U JPS62148575 U JP S62148575U JP 3539486 U JP3539486 U JP 3539486U JP 3539486 U JP3539486 U JP 3539486U JP S62148575 U JPS62148575 U JP S62148575U

Authority

JP

Japan

Prior art keywords

temperature measurement

furnace

ampoule body

measurement tube

ampoule

Prior art date

1986-03-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000003708 ampul Substances 0.000 claims description 4
• 238000000137 annealing Methods 0.000 claims description 3
• 239000011261 inert gas Substances 0.000 claims description 2
• 238000009529 body temperature measurement Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 description 1
• 230000037431 insertion Effects 0.000 description 1
• 238000003780 insertion Methods 0.000 description 1