JPS6214735U - - Google Patents

Info

Publication number
JPS6214735U
JPS6214735U JP10655585U JP10655585U JPS6214735U JP S6214735 U JPS6214735 U JP S6214735U JP 10655585 U JP10655585 U JP 10655585U JP 10655585 U JP10655585 U JP 10655585U JP S6214735 U JPS6214735 U JP S6214735U
Authority
JP
Japan
Prior art keywords
wafer boat
transporting
openings
edge portion
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10655585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10655585U priority Critical patent/JPS6214735U/ja
Publication of JPS6214735U publication Critical patent/JPS6214735U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP10655585U 1985-07-12 1985-07-12 Pending JPS6214735U (US20110009641A1-20110113-C00116.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10655585U JPS6214735U (US20110009641A1-20110113-C00116.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10655585U JPS6214735U (US20110009641A1-20110113-C00116.png) 1985-07-12 1985-07-12

Publications (1)

Publication Number Publication Date
JPS6214735U true JPS6214735U (US20110009641A1-20110113-C00116.png) 1987-01-29

Family

ID=30982024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10655585U Pending JPS6214735U (US20110009641A1-20110113-C00116.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPS6214735U (US20110009641A1-20110113-C00116.png)

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