JPS6214734U - - Google Patents

Info

Publication number
JPS6214734U
JPS6214734U JP10655485U JP10655485U JPS6214734U JP S6214734 U JPS6214734 U JP S6214734U JP 10655485 U JP10655485 U JP 10655485U JP 10655485 U JP10655485 U JP 10655485U JP S6214734 U JPS6214734 U JP S6214734U
Authority
JP
Japan
Prior art keywords
wafer boat
transfer
arcuate
utility
edge portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10655485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10655485U priority Critical patent/JPS6214734U/ja
Publication of JPS6214734U publication Critical patent/JPS6214734U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP10655485U 1985-07-12 1985-07-12 Pending JPS6214734U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10655485U JPS6214734U (US20030204162A1-20031030-M00001.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10655485U JPS6214734U (US20030204162A1-20031030-M00001.png) 1985-07-12 1985-07-12

Publications (1)

Publication Number Publication Date
JPS6214734U true JPS6214734U (US20030204162A1-20031030-M00001.png) 1987-01-29

Family

ID=30982022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10655485U Pending JPS6214734U (US20030204162A1-20031030-M00001.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPS6214734U (US20030204162A1-20031030-M00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912511A (US20030204162A1-20031030-M00001.png) * 1972-05-11 1974-02-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912511A (US20030204162A1-20031030-M00001.png) * 1972-05-11 1974-02-04

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