JPS6214718U - - Google Patents

Info

Publication number
JPS6214718U
JPS6214718U JP10652985U JP10652985U JPS6214718U JP S6214718 U JPS6214718 U JP S6214718U JP 10652985 U JP10652985 U JP 10652985U JP 10652985 U JP10652985 U JP 10652985U JP S6214718 U JPS6214718 U JP S6214718U
Authority
JP
Japan
Prior art keywords
supply device
gas supply
semiconductor gas
operated valve
opened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10652985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10652985U priority Critical patent/JPS6214718U/ja
Publication of JPS6214718U publication Critical patent/JPS6214718U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP10652985U 1985-07-12 1985-07-12 Pending JPS6214718U (US06277897-20010821-C00009.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10652985U JPS6214718U (US06277897-20010821-C00009.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10652985U JPS6214718U (US06277897-20010821-C00009.png) 1985-07-12 1985-07-12

Publications (1)

Publication Number Publication Date
JPS6214718U true JPS6214718U (US06277897-20010821-C00009.png) 1987-01-29

Family

ID=30981974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10652985U Pending JPS6214718U (US06277897-20010821-C00009.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPS6214718U (US06277897-20010821-C00009.png)

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