JPS6214308A - Vertical magnetic head - Google Patents

Abstract

PURPOSE:To improve the magnetic characteristics by providing a nonmagnetic amorphous thin film between a main magnetic pole and an auxiliary magnetic pole part where the main magnetic pole is formed. CONSTITUTION:A groove is formed at the corner part of a magnetic material block 10 made of an Mn-Zn ferrite, etc. Thus, a groove part 11 for junction of nonmagnetic member is obtained. Another groove is formed at the part 11 to obtain a groove part 12 for winding. Then, a nonmagnetic material block 13 of calcium titanate, barium titanate, etc. is welded to the part 11 and this junction face side is ground into a mirror surface. An amorphous silicon film 15 is formed at the junction face side of the 1st half-split block 14. Then an Ar gas Co-Zr-Nb amorphous film 16 is formed on the film 15 with Co-Zr-Nb defined as a target. The block 14 is etched into the desired track width. Thus, the 2nd half-split block 17 is obtained. Both blocks 14 and 17 are put together by means of an organic adhesive with the junction faces of both blocks butted with each other. Thus a main body block is obtained.

Description

[Detailed description of the invention]

(A) Field of Industrial Application The present invention relates to an improvement to a perpendicular magnetic head for achieving higher recording density. (b) Conventional technology Traditionally, magnetic recording has used a longitudinal recording method in which a ring-shaped head is used to record signals in the longitudinal (in-plane) direction of the recording medium, but in such a method, the recording wavelength becomes shorter. Since the self-demagnetizing field increases as a result, it was not suitable for high recording density.Recently, perpendicular magnetic recording methods have been proposed, which record signals perpendicular to the in-plane direction of the recording medium. This method consists of a perpendicular magnetic recording medium with an axis of easy magnetization perpendicular to the in-plane direction and a perpendicular magnetic head that has the ability to generate and detect a magnetic field in the perpendicular direction. In recent years, many studies have been conducted as an effective method for high-density magnetic recording because the recording density is more than twice as high. (c) Problems to be solved by the invention In order to increase the recording density of the perpendicular magnetic recording method, it is of course necessary to improve the recording medium and the peripheral system. Although necessary, it is important to reduce the thickness of the main magnetic pole of a perpendicular magnetic head that directly contacts a recording medium to record and reproduce signals. As disclosed in the above-mentioned Japanese Unexamined Patent Publication No. 153216/1983, Co-Zr based amorphous magnetic thin film is currently considered to be the most promising main magnetic pole because it has an excellent magnetic property of "-2-". However, there was a problem in the so-called thinning of the film.For example, JP-A-58
To explain the perpendicular magnetic head shown in FIG. 8, which has reduced spacing loss with respect to the recording medium compared to the one in Publication No. 153216, (1) is a main magnetic pole made of a Co-Zr amorphous magnetic thin film, <i) (γ) is a pair of auxiliary members that sandwich the main magnetic pole (1) from its both sides (Il+), and each of the auxiliary members (1) and (T) are magnetically connected to the main magnetic pole (1) and are wound. Auxiliary magnetic pole part (3a) (3a'
) and the return bus part (3b) (3b') which is the return bust of the magnetic flux of the main magnetic pole (1) (3c) (
3c') is formed on the magnetic material part (3) (
3'), and a groove part (3C) as a reinforcing spacer part to magnetically separate the return path part (3b) (3b') of the magnetic material part (3) (3') from the main pole (1). (3c'L
It is composed of non-magnetic material parts (4) and (4') joined to the L part. The main magnetic pole (1) to be rejected has good magnetic properties when it is amorphous, but it especially comes into contact with a magnetic material part (3') such as the auxiliary magnetic $A part (3a') on the side where sputtering is formed. During sputter formation, a portion of the several hundred 10-μm layer was affected by the ferrite crystal lattice (became crystalline, resulting in a decrease in magnetic properties in that portion.) Therefore, there is a certain limit to the thinning of the magnetic pole (1) which is necessary for increasing the recording density of the perpendicular magnetic hemet.
For example, there are about 3,000 people 1, and thinning the film beyond that would result in lower recording and reproducing efficiency, and the original advantages of perpendicular magnetic recording type 55 would not be exhibited. (2) Means for Solving the Problems In order to solve the problems described in -F, the present invention uses an amorphous magnetic thin film as a main magnetic pole, and an auxiliary magnetic pole that is magnetically connected to the main magnetic pole. Department and
In a perpendicular magnetic head having a return path section that serves as a return bus for the magnetic flux of the main magnetic pole, at least N4) 1: A non-magnetic amorphous thin film is provided between the magnetic pole and the auxiliary magnetic pole section where the main magnetic pole is formed. It is taken with the intervention of (e) Effect-1- The non-magnetic amorphous thin film of the perpendicular magnetic head of the present invention described above eliminates the influence of the crystal lattice from the auxiliary magnetic pole part that is the base when forming the main magnetic pole, so that the thin film state of the main magnetic pole is It acts to maintain good magnetic properties. (F) Example Hereinafter, an example of the present invention will be described with reference to the drawings. It should be noted that the same parts as in the prior art will not be given the same drawing numbers and their explanation will be omitted. That is, in the perpendicular magnetic head of the present invention, a nonmagnetic amorphous thin film (5
). Therefore, in the perpendicular magnetic head of the present invention, when forming the main pole (1) by sputtering, the auxiliary m pole part (3
By removing the influence of the crystal lattice from the magnetic material part (3') such as a'), it is possible to promote amorphousness over the entire thickness of the main pole (1), and also to improve the amorphous property during sputter formation. The influence of the magnetic properties from the magnetic material part (3') is reduced, and the magnetic anisotropy required for the main magnetic pole (1) is maintained, so the magnetic properties of the pond, such as coercive force and magnetic permeability, are also good. As a result, the recording/reproducing efficiency and thinning of the main magnetic pole are greatly improved. Comparing the recording density (Dso) using a two-layer recording medium (Co-Zr/N1-Fe), the results are shown in Figure 2, and it can be seen that the head of the present invention is significantly superior. , (N2) shows the case of the head of the present invention using amorphous tungsten trioxide as the non-magnetic amorphous thin film.Next, regarding the manufacturing method of the perpendicular magnetic hand of the present invention,
This will be explained with reference to FIGS. 3 to 7. First, as shown in FIG. 3, grooves are formed in the corners of a magnetic material block (10) made of Mn-Zn ferrite, etc. to form grooves (11) for joining non-magnetic materials, and then the grooves (
11) is further grooved to form a groove portion (12) for winding. After welding a non-magnetic material block (13) made of carunium titanate, barium titanate, etc. to the groove (11) of the magnetic material block (10) thus obtained, the joint surface side thereof is mirror-polished. Then, a first half block (b) as shown in FIG. 4 is obtained. Next, the joint side 6 of the first half block (14) is coated with RF sputtering (for example, λ, the target is polycrystalline silicon:
1 ton, gas is Alkon dehydrogen, gas pressure is 3 x 10”To
Suba 7 for about 10 min at rr, film formation rate 60 in/min)
9') Process to form an amorphous silicon film (15) of 600A (see Figure 5). Then, Co-Zr-Nb is further applied on top of that using the same RF sputtering method.
with Ar gas pressure 5×10-'Torr as a target.
After forming 2,500 co-Zr-Nh amo'L 77 films (16), the required track width was
7. Second half as shown in Figure 6/

[J・M7(V)
get. Then, to the second half-cut (17) obtained in this way, the tenth half-cut [1 (17)] as shown in FIG.
The joint surfaces of (c) are butted against each other and joined together using an organic adhesive, for example, to obtain a main body block (18) as shown in FIG. After that, insert the body block (1 or more) to the required height.
゛Width, for example 300. The perpendicular magnetic head of the present invention as shown in FIG. 1 can be obtained by slicing it to a thickness of 0.0 mm, processing the tip of the head (with radius), and winding it. In the above manufacturing process, the case where an amorphous tungsten dioxide film is formed as a non-magnetic amorphous thin film has been explained, but when forming an amorphous tungsten dioxide film, Al: The RF sputtering method was performed using 1 ton + oxygen and the gas pressure was 2 x 10-' Torr, and the formation deviation was good. Furthermore, in this embodiment, as shown in FIG. 1, a non-magnetic amorphous thin film is interposed only between the main pole (1) and the auxiliary member (2L) on which it is formed. The other magnetic material part (3) after manufacturing
Considering the influence of σ from the above, it is also possible to avoid interposing a non-magnetic amorphous thin film between the auxiliary member (1) and the other auxiliary member (1). (g) Effects of the Invention As described above, the perpendicular magnetic helix of the present invention has a non-magnetic amorphous material between the main magnetic pole made of an amorphous magnetic thin film and the auxiliary magnetic pole part that is magnetically joined to the main magnetic pole. Since the thin film is interposed, the influence of the crystal lattice from the auxiliary magnetic pole part can be removed and the magnetic properties of the main magnetic pole in the thin film state can be improved, improving recording and reproducing efficiency and increasing recording density. can be measured.

[Brief explanation of the drawing]

Figure 1 is a 4" view of the perpendicular magnetic head of the present invention, Figure 2 is a diagram showing the head of the present invention and the conventional head, and Figure 3 is a diagram showing the head of the present invention and a conventional head.
Figures 7 to 7 respectively show the manufacturing process, Figure 3 is a perspective view showing the process of forming the groove, Figure 4 is a perspective view showing the first half block, and Figure 5 is the amorphous silicon film. FIG. 6 is a diagram showing the second half block, FIG. 7 is a diagram showing the main body block, and FIG. 8 is a diagram showing the conventional head. (1) ...Main magnetic pole made of twisted amorphous magnetic thin film, (3a)
<3a') --- Auxiliary magnetic pole part, (3b) (3b')
Return bus part, (5) Non-magnetic amorphous thin film.

Claims (1)

[Claims] (1) In a perpendicular magnetic head that has an amorphous magnetic thin film as a main pole, an auxiliary pole part that is magnetically joined to the main pole, and a return path part that serves as a return path for the magnetic flux of the main pole, at least A perpendicular magnetic head characterized in that a nonmagnetic amorphous thin film is interposed between the main magnetic pole and the auxiliary magnetic pole portion where the main magnetic pole is formed.