JPS6214223B2 - - Google Patents

Info

Publication number
JPS6214223B2
JPS6214223B2 JP59205869A JP20586984A JPS6214223B2 JP S6214223 B2 JPS6214223 B2 JP S6214223B2 JP 59205869 A JP59205869 A JP 59205869A JP 20586984 A JP20586984 A JP 20586984A JP S6214223 B2 JPS6214223 B2 JP S6214223B2
Authority
JP
Japan
Prior art keywords
rotating shaft
reaction chamber
wafer support
magnetic fluid
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59205869A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6184373A (ja
Inventor
Kichizo Komyama
Takehiko Kobayashi
Isao Sekya
Yoshinori Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP20586984A priority Critical patent/JPS6184373A/ja
Publication of JPS6184373A publication Critical patent/JPS6184373A/ja
Publication of JPS6214223B2 publication Critical patent/JPS6214223B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP20586984A 1984-10-01 1984-10-01 気相成長装置 Granted JPS6184373A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20586984A JPS6184373A (ja) 1984-10-01 1984-10-01 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20586984A JPS6184373A (ja) 1984-10-01 1984-10-01 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6184373A JPS6184373A (ja) 1986-04-28
JPS6214223B2 true JPS6214223B2 (enrdf_load_stackoverflow) 1987-04-01

Family

ID=16514066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20586984A Granted JPS6184373A (ja) 1984-10-01 1984-10-01 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6184373A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9279185B2 (en) * 2012-06-14 2016-03-08 Asm Technology Singapore Pte Ltd Feed-through apparatus for a chemical vapour deposition device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device
JPS58213413A (ja) * 1982-06-04 1983-12-12 Nippon Telegr & Teleph Corp <Ntt> 半導体気相成長用装置

Also Published As

Publication number Publication date
JPS6184373A (ja) 1986-04-28

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