JPS62136288U - - Google Patents

Info

Publication number

JPS62136288U

JPS62136288U JP2422086U JP2422086U JPS62136288U JP S62136288 U JPS62136288 U JP S62136288U JP 2422086 U JP2422086 U JP 2422086U JP 2422086 U JP2422086 U JP 2422086U JP S62136288 U JPS62136288 U JP S62136288U

Authority

JP

Japan

Prior art keywords

vibrator

substrate

bonded

cleaning tank

metal plate

Prior art date

1986-02-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 8
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims 3
• 239000002184 metal Substances 0.000 claims 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
• 239000000853 adhesive Substances 0.000 description 2
• 230000001070 adhesive effect Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 238000001035 drying Methods 0.000 description 2